晶圆针测平台宏茂微于2016年导入晶圆级测试代工服务，平台由Advantest以及Teradyne两大平台为主轴，提供存储器晶圆级针测服务，满足客户端全流程封测需求。
| Machine | Capability Index | Configuration | Picture |
| V5400(Tester) | Data Rate | 100MHz 12ep |
 |
| I/O Channels | 4608 | ||
| PPS Channels | 576 | ||
| PMU | 144 | ||
| Pattern Vector Memory (VM) | 16M | ||
| Buffer Memory (BM) | 8 MBIT/32IO | ||
| Error Catch RAM (ECR) | 128M or 256MBIT/32IO | ||
| UF3000(Prober) | Loader Wafer Size | 8, 12 inch |
 |
| Position Accuracy | ±2um | ||
| XY Resolution | 0.1um | ||
| Z Resolution | 0.25um | ||
| Temperature Range | -40℃~150℃ |
| Machine | Capability Index | Configuration | Picture |
| V5400(Tester) | Data Rate | 50MHz |  |
| I/O Channels | 4608 | ||
| PPS Channels | 576 | ||
| PMU | 144 | ||
| Pattern Vector Memory (VM) | 16M | ||
| Buffer Memory (BM) | 8 MBIT/32IO | ||
| Error Catch RAM (ECR) | 128M or 256MBIT/32IO | ||
| UF3000(Prober) | Loader Wafer Size | 8, 12 inch |
 |
| Position Accuracy | ±2um | ||
| XY Resolution | 0.1um | ||
| Z Resolution | 0.25um | ||
| Temperature Range | -40℃~150℃ |
| Machine | Capability Index | Configuration | Picture |
| V5400(Tester) | Data Rate | 100MHz |
 |
| I/O Channels | 4608 | ||
| PPS Channels | 576 | ||
| PMU | 144 | ||
| Pattern Vector Memory (VM) | 16M | ||
| Buffer Memory (BM) | 8 MBIT/32IO | ||
| Error Catch RAM (ECR) | 128M or 256MBIT/32IO | ||
| UF3000(Prober) | Loader Wafer Size | 8, 12 inch |
 |
| Position Accuracy | ±2um | ||
| XY Resolution | 0.1um | ||
| Z Resolution | 0.25um | ||
| Temperature Range | -40℃~150℃ |
| Machine | Capability Index | Configuration | Picture |
| T5377S(Tester) | Data Rate | 142.8MHZ |
 |
| Digital Channels | 3712 | ||
| PPS | 256 | ||
| Pattern Memory | 72M(high-speed) | ||
| FRMA | 8G | ||
| Opus3(Prober) | Loader Wafer Size | 8, 12 inch |
 |
| Position Accuracy | X/Y : ± 1.5um, Z : ±3um | ||
| XY Resolution | 0.0035um | ||
| Z Resolution | 0.045um | ||
| Temperature Range | -55℃~200℃ |
|
Machine |
Capability Index |
Configuration |
Picture |
|
M2_SV(Tester) |
128 Pin Electronic channels |
|
|
|
8 System PMUs(1 per 16 pins) |
|
||
|
8 Split DPS(1 per 16 pins) |
|
||
|
APG,with larger DBM |
|
||
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Very Deep LVM,SCAN |
|
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|
2 ECRs(1 per 64 pins) |
|
||
|
Controller(“X” GHz P-IV) |
|
||
|
Opus3(Prober) |
Loader Wafer Size |
8, 12 inch |
|
|
Position Accuracy |
X/Y : ± 1.5um, Z : ±3um |
||
|
XY Resolution |
0.0035um |
||
|
Z Resolution |
0.045um |
||
|
Temperature Range |
-55℃~200℃ |
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